Article
A compact, ultra-high vacuum ion source for isotopically enriching and depositing…
The Review of scientific instruments · 2019 · HS. Kim, JM. Pomeroy, ANR. Ramanayaka, DS. Simons, K. Tang
Key facts
| Title | A compact, ultra-high vacuum ion source for isotopically enriching and depositing <sup>28</sup>Si thin films. |
|---|---|
| First author | HS. Kim, JM. Pomeroy, ANR. Ramanayaka, DS. Simons, K. Tang |
| Journal | The Review of scientific instruments |
| Published | Aug 1, 2019 |
| DOI | 10.1063/1.5097937 |
| PubMed ID | 31472599 |
| PMC ID | PMC6916650 |
| Devices mentioned | 083308 |
At a glance
- 1–9 FDA submissions mentioned
- None Product codes mentioned
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